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Section
I - Laws and Definitions
(4 - 6 Hrs.)
A.
Vacuum
B. Atoms & Molecules - Kinetic Theory
C. Gas
D. Pressure
E. Atmospheric Pressure
F. Partial Pressure
G. Dalton's Law
H. Boyle's Law
I. Charles' Law
J. Gay-Lussac Law
K. General Gas Law
L. Ideal Gas Law
M. Gram-Mole & Avogadro's Law
N. Q
O. Vapor Pressure & Hoenig's Curves
P. Mean Free Path
Section
II - Components
(10- 12 Hrs.)
A.
Mechanical Pumps
1. Rotary Oil-Sealed
2. Roots "Blowers"
3. "Claw" Pumps
4. Combination "Dry" Pumps
5. Screw Pumps
6. Piston Pumps
B. Vapor Diffusion Pumps
C. Valves, Traps, Baffles
D. Chambers
E. Gauges
1.
Thermal Conductivity
2.
"Hot" & "Cold" Ionization
3.
Radioactive
4.
Capacitance Manometers
5.
Shultz-Phelps
Section
III - Complete System
( 8 - 10 Hrs.)
A. Conductances
1. Gas Flow Regimes
2. Conductance Formulae
B. Pump Sizing
C. Sequential Valving
D. Safeties & Gauge Points
E. Equipment Environment
1.
Utilities
2.
Space
3.
Maintainability Considerations
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Section
IV - Other Pumping Stations
A. Load
Lock Diffusion Pumped System
1. Advantages & Disadvantages
2. Multi- chamber systems
B. Titanium Sublimation Pumps (optional)
1. TSP System
C. Sputter Ion Pumps (optional)
1. Electromagnetic
2. Diodes
3. Triodes
D. Turbomolecular Pumps
1. Vertical
2. Horizontal
3. Drag
4. Turbo-drag
5. TMP System
E. Sorption Pumps (optional)
1. Cryosorption
F. Cryopumping
1. He Recirculation
Section
V - Materials (Sect. V & VI 8 - 10 Hrs)
A. Five
Basic Material Considerations
B. Pump Fluids and Lubricants
C. Elastomers and Metal Seals
D. Glasses & Ceramics
E. Metals - Finishes, Plating, etc.
F. Solvents and Cleaning
Section
VI - General Maintenance
A.
Maintenance "Hints & Kinks"
B. Tools & Assembly Tips
C. Operator Guidelines
D. Leaks & Leak-up
Section VII - Associated Equipment
(Sect. VII 8 Hrs.)
A. He
Mass Spectrometer Leak Detectors
1. Mass Spectrometers
2. Types "1, 2, & 3" instruments
3. Leak Detection Techniques
B. R.G.A.s
1. Types
2. "Cracking Patterns"
3. Applications
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